Antireflecting-Chromium Linewidth Standard, SRM 473, for Calibration of Optical Microscope Linewidth Measuring Systems
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Place / Publishing House: | Washington : U.S. Government Printing Office, 1997 |
Year of Publication: | 1997 |
Language: | ### |
Series: | NIST Special Publication, 260 = Standard Reference Materials
129 |
Physical Description: | 35 S. |
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ac_no: | YW00015698 |
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Hierarchical level: | Monograph |