Atom Probe Tomography of Hard Nitride and Boride Thin Films.

Saved in:
Bibliographic Details
Superior document:Linköping Studies in Science and Technology. Dissertations Series ; v.1995
:
Place / Publishing House:Linköping : : Linkopings Universitet,, 2019.
{copy}2019.
Year of Publication:2019
Edition:1st ed.
Language:English
Series:Linköping Studies in Science and Technology. Dissertations Series
Online Access:
Physical Description:1 online resource (98 pages)
Tags: Add Tag
No Tags, Be the first to tag this record!
id 5005845531
ctrlnum (MiAaPQ)5005845531
(Au-PeEL)EBL5845531
(OCoLC)1113893211
collection bib_alma
record_format marc
spelling Engberg, David L. J.
Atom Probe Tomography of Hard Nitride and Boride Thin Films.
1st ed.
Linköping : Linkopings Universitet, 2019.
{copy}2019.
1 online resource (98 pages)
text txt rdacontent
computer c rdamedia
online resource cr rdacarrier
Linköping Studies in Science and Technology. Dissertations Series ; v.1995
Intro -- ABSTRACT -- POPULÄRVETENSKAPLIG SAMMANFATTNING -- PREFACE -- ACKNOWLEDGEMENTS -- LIST OF INCLUDED PAPERS -- ACRONYMS -- TABLE OF CONTENTS -- 1. INTRODUCTION -- 2. MATERIALS -- 3. THIN FILM DEPOSITION -- 4. CHARACTERIZATION -- 5. ATOM PROBE TOMOGRAPHY -- 6. APT RECONSTRUCTION AND DATA TREATMENT -- 7. MAIN RESULTS &amp -- CONTRIBUTIONS TO THE FIELD -- 8. FUTURE OUTLOOK -- BIBLIOGRAPHY -- PAPERS -- Papers.
Description based on publisher supplied metadata and other sources.
Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2024. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries.
Electronic books.
Print version: Engberg, David L. J. Atom Probe Tomography of Hard Nitride and Boride Thin Films Linköping : Linkopings Universitet,c2019
ProQuest (Firm)
Linköping Studies in Science and Technology. Dissertations Series
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=5845531 Click to View
language English
format eBook
author Engberg, David L. J.
spellingShingle Engberg, David L. J.
Atom Probe Tomography of Hard Nitride and Boride Thin Films.
Linköping Studies in Science and Technology. Dissertations Series ;
Intro -- ABSTRACT -- POPULÄRVETENSKAPLIG SAMMANFATTNING -- PREFACE -- ACKNOWLEDGEMENTS -- LIST OF INCLUDED PAPERS -- ACRONYMS -- TABLE OF CONTENTS -- 1. INTRODUCTION -- 2. MATERIALS -- 3. THIN FILM DEPOSITION -- 4. CHARACTERIZATION -- 5. ATOM PROBE TOMOGRAPHY -- 6. APT RECONSTRUCTION AND DATA TREATMENT -- 7. MAIN RESULTS &amp -- CONTRIBUTIONS TO THE FIELD -- 8. FUTURE OUTLOOK -- BIBLIOGRAPHY -- PAPERS -- Papers.
author_facet Engberg, David L. J.
author_variant d l j e dlj dlje
author_sort Engberg, David L. J.
title Atom Probe Tomography of Hard Nitride and Boride Thin Films.
title_full Atom Probe Tomography of Hard Nitride and Boride Thin Films.
title_fullStr Atom Probe Tomography of Hard Nitride and Boride Thin Films.
title_full_unstemmed Atom Probe Tomography of Hard Nitride and Boride Thin Films.
title_auth Atom Probe Tomography of Hard Nitride and Boride Thin Films.
title_new Atom Probe Tomography of Hard Nitride and Boride Thin Films.
title_sort atom probe tomography of hard nitride and boride thin films.
series Linköping Studies in Science and Technology. Dissertations Series ;
series2 Linköping Studies in Science and Technology. Dissertations Series ;
publisher Linkopings Universitet,
publishDate 2019
physical 1 online resource (98 pages)
edition 1st ed.
contents Intro -- ABSTRACT -- POPULÄRVETENSKAPLIG SAMMANFATTNING -- PREFACE -- ACKNOWLEDGEMENTS -- LIST OF INCLUDED PAPERS -- ACRONYMS -- TABLE OF CONTENTS -- 1. INTRODUCTION -- 2. MATERIALS -- 3. THIN FILM DEPOSITION -- 4. CHARACTERIZATION -- 5. ATOM PROBE TOMOGRAPHY -- 6. APT RECONSTRUCTION AND DATA TREATMENT -- 7. MAIN RESULTS &amp -- CONTRIBUTIONS TO THE FIELD -- 8. FUTURE OUTLOOK -- BIBLIOGRAPHY -- PAPERS -- Papers.
isbn 9789176850435
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=5845531
illustrated Not Illustrated
oclc_num 1113893211
work_keys_str_mv AT engbergdavidlj atomprobetomographyofhardnitrideandboridethinfilms
status_str n
ids_txt_mv (MiAaPQ)5005845531
(Au-PeEL)EBL5845531
(OCoLC)1113893211
carrierType_str_mv cr
hierarchy_parent_title Linköping Studies in Science and Technology. Dissertations Series ; v.1995
is_hierarchy_title Atom Probe Tomography of Hard Nitride and Boride Thin Films.
container_title Linköping Studies in Science and Technology. Dissertations Series ; v.1995
marc_error Info : MARC8 translation shorter than ISO-8859-1, choosing MARC8. --- [ 856 : z ]
_version_ 1792331056361242625
fullrecord <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02024nam a22003733i 4500</leader><controlfield tag="001">5005845531</controlfield><controlfield tag="003">MiAaPQ</controlfield><controlfield tag="005">20240229073832.0</controlfield><controlfield tag="006">m o d | </controlfield><controlfield tag="007">cr cnu||||||||</controlfield><controlfield tag="008">240229s2019 xx o ||||0 eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9789176850435</subfield><subfield code="q">(electronic bk.)</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(MiAaPQ)5005845531</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(Au-PeEL)EBL5845531</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)1113893211</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">MiAaPQ</subfield><subfield code="b">eng</subfield><subfield code="e">rda</subfield><subfield code="e">pn</subfield><subfield code="c">MiAaPQ</subfield><subfield code="d">MiAaPQ</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Engberg, David L. J.</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Atom Probe Tomography of Hard Nitride and Boride Thin Films.</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">1st ed.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Linköping :</subfield><subfield code="b">Linkopings Universitet,</subfield><subfield code="c">2019.</subfield></datafield><datafield tag="264" ind1=" " ind2="4"><subfield code="c">{copy}2019.</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 online resource (98 pages)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">computer</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">online resource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Linköping Studies in Science and Technology. Dissertations Series ;</subfield><subfield code="v">v.1995</subfield></datafield><datafield tag="505" ind1="0" ind2=" "><subfield code="a">Intro -- ABSTRACT -- POPULÄRVETENSKAPLIG SAMMANFATTNING -- PREFACE -- ACKNOWLEDGEMENTS -- LIST OF INCLUDED PAPERS -- ACRONYMS -- TABLE OF CONTENTS -- 1. INTRODUCTION -- 2. MATERIALS -- 3. THIN FILM DEPOSITION -- 4. CHARACTERIZATION -- 5. ATOM PROBE TOMOGRAPHY -- 6. APT RECONSTRUCTION AND DATA TREATMENT -- 7. MAIN RESULTS &amp;amp -- CONTRIBUTIONS TO THE FIELD -- 8. FUTURE OUTLOOK -- BIBLIOGRAPHY -- PAPERS -- Papers.</subfield></datafield><datafield tag="588" ind1=" " ind2=" "><subfield code="a">Description based on publisher supplied metadata and other sources.</subfield></datafield><datafield tag="590" ind1=" " ind2=" "><subfield code="a">Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2024. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries. </subfield></datafield><datafield tag="655" ind1=" " ind2="4"><subfield code="a">Electronic books.</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Print version:</subfield><subfield code="a">Engberg, David L. J.</subfield><subfield code="t">Atom Probe Tomography of Hard Nitride and Boride Thin Films</subfield><subfield code="d">Linköping : Linkopings Universitet,c2019</subfield></datafield><datafield tag="797" ind1="2" ind2=" "><subfield code="a">ProQuest (Firm)</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Linköping Studies in Science and Technology. Dissertations Series</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=5845531</subfield><subfield code="z">Click to View</subfield></datafield></record></collection>