Modellierung und Simulation Nichtlinearer Effekte in Kapazitiv Gekoppelten Hochfrequenzplasmen / / Dennis Ziegler.
Saved in:
| VerfasserIn: | |
|---|---|
| Place / Publishing House: | Berlin : : Logos Verlag,, 2010. |
| Year of Publication: | 2010 |
| Language: | German |
| Online Access: | |
| Physical Description: | 1 online resource (134 pages) |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| ISBN: | 9783832526207 9783832599645 (ebook) |
|---|---|
| Hierarchical level: | Monograph |
| Statement of Responsibility: | Dennis Ziegler. |