Modellierung und Simulation Nichtlinearer Effekte in Kapazitiv Gekoppelten Hochfrequenzplasmen / / Dennis Ziegler.
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Place / Publishing House: | Berlin : : Logos Verlag,, 2010. |
Year of Publication: | 2010 |
Language: | German |
Online Access: | |
Physical Description: | 1 online resource (134 pages) |
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ISBN: | 9783832526207 9783832599645 (ebook) |
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Hierarchical level: | Monograph |
Statement of Responsibility: | Dennis Ziegler. |