Metastable ScAlN and YAlN Thin Films Grown by Reactive Magnetron Sputter Epitaxy.
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| Superior document: | Linköping Studies in Science and Technology. Dissertations Series ; v.1564 |
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| Place / Publishing House: | Linköping : : Linkopings Universitet,, 2014. {copy}2014. |
| Year of Publication: | 2014 |
| Edition: | 1st ed. |
| Language: | English |
| Series: | Linköping Studies in Science and Technology. Dissertations Series
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| Online Access: | |
| Physical Description: | 1 online resource (81 pages) |
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Table of Contents:
- Intro
- Abstract
- Populärvetenskaplig sammanfattning
- Preface
- Acknowledgements
- Included papers
- Related papers
- Table of contents
- Chapter 1 Introduction
- Chapter 2 Materials
- Chapter 3 Growth
- Chapter 4 Modeling
- Chapter 5 Characterization
- Chapter 6 Summary of included papers
- Chapter 7 Contribution to the field
- Chapter 8 Future work
- Chapter 9 References.