Handbook of vacuum science and technology / edited by Dorothy M. Hoffman, Bawa Singh, John H. Thomas, III.
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| TeilnehmendeR: | |
| Year of Publication: | 1998 |
| Language: | English |
| Online Access: | |
| Physical Description: | xxii, 835 p. :; ill. |
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| Bibliography: | Includes bibliographical references and index. |
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| ISBN: | 9780123520654 0123520657 (alk. paper) |
| Hierarchical level: | Monograph |
| Statement of Responsibility: | edited by Dorothy M. Hoffman, Bawa Singh, John H. Thomas, III. |