Carbon Nitride and Carbon Fluoride Thin Films Prepared by HiPIMS.

Carbon Nitride and Carbon Fluoride Thin Films Prepared by HiPIMS.

Saved in:
Bibliographic Details
Superior document:Linköping Studies in Science and Technology. Dissertations Series ; v.1512
:
Schmidt, Susann.
Place / Publishing House:Linköping : : Linkopings Universitet,, 2013.
{copy}2013.
Year of Publication:2013
Edition:1st ed.
Language:English
Series:Linköping Studies in Science and Technology. Dissertations Series
Online Access:
Physical Description:1 online resource (104 pages)
Tags: Add Tag
No Tags, Be the first to tag this record!
id 50030401559
ctrlnum (MiAaPQ)50030401559
(Au-PeEL)EBL30401559
(OCoLC)1372395460
collection bib_alma
fullrecord <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01597nam a22003613i 4500</leader><controlfield tag="001">50030401559</controlfield><controlfield tag="003">MiAaPQ</controlfield><controlfield tag="005">20240229073850.0</controlfield><controlfield tag="006">m o d | </controlfield><controlfield tag="007">cr cnu||||||||</controlfield><controlfield tag="008">240229s2013 xx o ||||0 eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9789175196428</subfield><subfield code="q">(electronic bk.)</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(MiAaPQ)50030401559</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(Au-PeEL)EBL30401559</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)1372395460</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">MiAaPQ</subfield><subfield code="b">eng</subfield><subfield code="e">rda</subfield><subfield code="e">pn</subfield><subfield code="c">MiAaPQ</subfield><subfield code="d">MiAaPQ</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Schmidt, Susann.</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Carbon Nitride and Carbon Fluoride Thin Films Prepared by HiPIMS.</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">1st ed.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Linköping :</subfield><subfield code="b">Linkopings Universitet,</subfield><subfield code="c">2013.</subfield></datafield><datafield tag="264" ind1=" " ind2="4"><subfield code="c">{copy}2013.</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 online resource (104 pages)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">computer</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">online resource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Linköping Studies in Science and Technology. Dissertations Series ;</subfield><subfield code="v">v.1512</subfield></datafield><datafield tag="588" ind1=" " ind2=" "><subfield code="a">Description based on publisher supplied metadata and other sources.</subfield></datafield><datafield tag="590" ind1=" " ind2=" "><subfield code="a">Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2024. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries. </subfield></datafield><datafield tag="655" ind1=" " ind2="4"><subfield code="a">Electronic books.</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Print version:</subfield><subfield code="a">Schmidt, Susann</subfield><subfield code="t">Carbon Nitride and Carbon Fluoride Thin Films Prepared by HiPIMS</subfield><subfield code="d">Linköping : Linkopings Universitet,c2013</subfield></datafield><datafield tag="797" ind1="2" ind2=" "><subfield code="a">ProQuest (Firm)</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Linköping Studies in Science and Technology. Dissertations Series</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=30401559</subfield><subfield code="z">Click to View</subfield></datafield></record></collection>
record_format marc
spelling Schmidt, Susann.
Carbon Nitride and Carbon Fluoride Thin Films Prepared by HiPIMS.
1st ed.
Linköping : Linkopings Universitet, 2013.
{copy}2013.
1 online resource (104 pages)
text txt rdacontent
computer c rdamedia
online resource cr rdacarrier
Linköping Studies in Science and Technology. Dissertations Series ; v.1512
Description based on publisher supplied metadata and other sources.
Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2024. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries.
Electronic books.
Print version: Schmidt, Susann Carbon Nitride and Carbon Fluoride Thin Films Prepared by HiPIMS Linköping : Linkopings Universitet,c2013
ProQuest (Firm)
Linköping Studies in Science and Technology. Dissertations Series
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=30401559 Click to View
language English
format eBook
author Schmidt, Susann.
spellingShingle Schmidt, Susann.
Carbon Nitride and Carbon Fluoride Thin Films Prepared by HiPIMS.
Linköping Studies in Science and Technology. Dissertations Series ;
author_facet Schmidt, Susann.
author_variant s s ss
author_sort Schmidt, Susann.
title Carbon Nitride and Carbon Fluoride Thin Films Prepared by HiPIMS.
title_full Carbon Nitride and Carbon Fluoride Thin Films Prepared by HiPIMS.
title_fullStr Carbon Nitride and Carbon Fluoride Thin Films Prepared by HiPIMS.
title_full_unstemmed Carbon Nitride and Carbon Fluoride Thin Films Prepared by HiPIMS.
title_auth Carbon Nitride and Carbon Fluoride Thin Films Prepared by HiPIMS.
title_new Carbon Nitride and Carbon Fluoride Thin Films Prepared by HiPIMS.
title_sort carbon nitride and carbon fluoride thin films prepared by hipims.
series Linköping Studies in Science and Technology. Dissertations Series ;
series2 Linköping Studies in Science and Technology. Dissertations Series ;
publisher Linkopings Universitet,
publishDate 2013
physical 1 online resource (104 pages)
edition 1st ed.
isbn 9789175196428
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=30401559
illustrated Not Illustrated
oclc_num 1372395460
work_keys_str_mv AT schmidtsusann carbonnitrideandcarbonfluoridethinfilmspreparedbyhipims
status_str n
ids_txt_mv (MiAaPQ)50030401559
(Au-PeEL)EBL30401559
(OCoLC)1372395460
carrierType_str_mv cr
hierarchy_parent_title Linköping Studies in Science and Technology. Dissertations Series ; v.1512
is_hierarchy_title Carbon Nitride and Carbon Fluoride Thin Films Prepared by HiPIMS.
container_title Linköping Studies in Science and Technology. Dissertations Series ; v.1512
marc_error Info : MARC8 translation shorter than ISO-8859-1, choosing MARC8. --- [ 856 : z ]
_version_ 1792331069599514625

Similar Items