Growth and Characterization of Amorphous TiAlSiN and HfAlSiN Thin Films.

Growth and Characterization of Amorphous TiAlSiN and HfAlSiN Thin Films.

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Superior document:Linköping Studies in Science and Technology. Thesis Series ; v.1542
:
Fager, Hanna.
Place / Publishing House:Linköping : : Linkopings Universitet,, 2012.
{copy}2012.
Year of Publication:2012
Edition:1st ed.
Language:English
Series:Linköping Studies in Science and Technology. Thesis Series
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Physical Description:1 online resource (56 pages)
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record_format marc
spelling Fager, Hanna.
Growth and Characterization of Amorphous TiAlSiN and HfAlSiN Thin Films.
1st ed.
Linköping : Linkopings Universitet, 2012.
{copy}2012.
1 online resource (56 pages)
text txt rdacontent
computer c rdamedia
online resource cr rdacarrier
Linköping Studies in Science and Technology. Thesis Series ; v.1542
Description based on publisher supplied metadata and other sources.
Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2024. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries.
Electronic books.
Print version: Fager, Hanna Growth and Characterization of Amorphous TiAlSiN and HfAlSiN Thin Films Linköping : Linkopings Universitet,c2012
ProQuest (Firm)
Linköping Studies in Science and Technology. Thesis Series
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=30401066 Click to View
language English
format eBook
author Fager, Hanna.
spellingShingle Fager, Hanna.
Growth and Characterization of Amorphous TiAlSiN and HfAlSiN Thin Films.
Linköping Studies in Science and Technology. Thesis Series ;
author_facet Fager, Hanna.
author_variant h f hf
author_sort Fager, Hanna.
title Growth and Characterization of Amorphous TiAlSiN and HfAlSiN Thin Films.
title_full Growth and Characterization of Amorphous TiAlSiN and HfAlSiN Thin Films.
title_fullStr Growth and Characterization of Amorphous TiAlSiN and HfAlSiN Thin Films.
title_full_unstemmed Growth and Characterization of Amorphous TiAlSiN and HfAlSiN Thin Films.
title_auth Growth and Characterization of Amorphous TiAlSiN and HfAlSiN Thin Films.
title_new Growth and Characterization of Amorphous TiAlSiN and HfAlSiN Thin Films.
title_sort growth and characterization of amorphous tialsin and hfalsin thin films.
series Linköping Studies in Science and Technology. Thesis Series ;
series2 Linköping Studies in Science and Technology. Thesis Series ;
publisher Linkopings Universitet,
publishDate 2012
physical 1 online resource (56 pages)
edition 1st ed.
isbn 9789175198439
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=30401066
illustrated Not Illustrated
oclc_num 1372397087
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is_hierarchy_title Growth and Characterization of Amorphous TiAlSiN and HfAlSiN Thin Films.
container_title Linköping Studies in Science and Technology. Thesis Series ; v.1542
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