Ultra clean processing of semiconductor surfaces XII : : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium / / edited by Paul Mertens, Marc Meuris and Marc Heyns.
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| Superior document: | Solid State Phenomena, Volume 219 |
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| TeilnehmendeR: | |
| Place / Publishing House: | Pfaffikon, Switzerland : : TTP,, 2014. Enfield, New Hampshire : : Trans Tech Publications Ltd,, [date of distribution not identified] 2014 |
| Year of Publication: | 2014 |
| Language: | English |
| Series: | Diffusion and defect data. Solid state phenomena ;
Volume 219. |
| Online Access: | |
| Physical Description: | 1 online resource (331 pages) :; illustrations. |
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| Bibliography: | Includes bibliographical references at the end of each chapters and index. |
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| ISBN: | 9783038352426 9783038266266 |
| ISSN: | 1662-7799 ; |
| Hierarchical level: | Monograph |
| Statement of Responsibility: | edited by Paul Mertens, Marc Meuris and Marc Heyns. |