Nanoimprint technology : nanotransfer for thermoplastic and photocurable polymer / / editors, Jun Taniguchi ... [et al.].

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Bibliographic Details
Superior document:Microsystem and Nanotechnology Series
:
TeilnehmendeR:
Year of Publication:2013
Edition:1st ed.
Language:English
Series:Wiley microsystem and nanotechnology series.
Online Access:
Physical Description:1 online resource (xiv, 221 p.) :; ill.
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Description
Bibliography:Includes bibliographical references at the end of each chapters and index.
ISBN:9781118359839
9781118535080 (electronic bk.)
Hierarchical level:Monograph
Statement of Responsibility: editors, Jun Taniguchi ... [et al.].