Transmission electron microscopy in micro-nanoelectronics / edited by Alain Claverie.
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| Year of Publication: | 2013 |
| Language: | English |
| Series: | Nanoscience and nanotechnology series
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| Online Access: | |
| Physical Description: | xiii, 243 p. :; ill. |
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| Bibliography: | Includes bibliographical references and index. |
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| ISBN: | 9781848213678 9781118579039 (electronic bk.) |
| Hierarchical level: | Monograph |
| Statement of Responsibility: | edited by Alain Claverie. |